Kievits, Arent J.; Duinkerken, B. H. Peter; Fermie, Job ; Lane, Ryan; Giepmans, Ben N.G. et. al. (2023): Microscopy data underlying the publication "Optical STEM detection for scanning electron microscopy". Version 1. 4TU.ResearchData. software. https://doi.org/10.4121/9c98aee1-608e-4c71-8b89-dcb1e8eb3e5e.v1

Software

x choose version: version 2 - 2023-10-31 (latest)

• Optical Physics
• Physical Sciences

Electron Detection, Instrumentation Development, Scanning Electron Microscopy, Scanning Transmission Electron Microscopy, Volume Electron Microscopy

16-07-2021 -- 16-05-2023

CC BY 4.0

RefWorks, BibTeX, Reference Manager, Endnote, DataCite, NLM, DC, CFF

by Arent J. Kievits , B. H. Peter Duinkerken , Job Fermie , Ryan Lane , Ben N.G. Giepmans , Jacob Hoogenboom

Raw microscopy data underlying the publication, structured per experiment (figure). The imaging setting that is varied in the experiments (exposure/dwell time, beam current, landing energy) is indicated by the folder or image name. The images may have a data bar indicating the relevant acquisition settings.

• For more information on the sample preparation and image acquisition, see the Methodology section in the publication.
• The code and data analysis notebooks are included in the accompanying Github repository: https://github.com/hoogenboom-group/Kievits-OSTEM-2023

Data set structure:

• 1_Optimization-OSTEM: contains the images for the landing energy optimization (Figure 2 in the article). Images have a pixel size of 1 nm and where acquired with increments of 500 eV (electron volts). Dwell times are indicated in the folder names. The 'Qualitative' folder contains a subset of these data for ease of plotting Figure 2A.
• 2_Qualitative-comparison: contains qualitative images of rat pancreas and zebrafish larva (Figure 3). Both raw images (with metadata in TIFF header) and cropped images are included (used for publication). Images have a pixel size of 4 nm.
• 3_SNR-comparison-detectors: contains images used for the quantitative comparison of detectors (Figure 4). Contains a folder per detection technique with all the images. The 'Qualitative' folder contains a subset of these data for ease of plotting Figure 4A.
• 4_Image-resolution-detectors: contains raw images and extracted edge widths from FEI Image (Figure 5). The acquisition settings are indicated in the folder names, with one folder per detection technique.
• 5_Current-SNR-relation: contains the images with increasing beam current / fixed dwell time and increasing dwell time / fixed current (Figure 6). The 'Qualitative' folder contains a subset of the data for ease of plotting Figure 6A and 6B.
• 6_Supplementary: contains the supplementary data, used for the background texture analysis. The results in Figure S4 and Table S1 are based on these images.

General acquisition parameters

Pixel size = 1 nm (unless stated otherwise)

Beam current = 0.4nA (unless stated otherwise)

BSD, SE Landing energy = 1.5keV (typically)

OSTEM landing energy = 4keV (typically)

ADF-STEM landing energy = 25keV

• 2023-10-16 first online, published, posted

4TU.ResearchData

TIFF, PNG

• ZonMw (grant code 91111.006) [more info...] ZonMw
• NWO National Roadmap for Large-Scale Research Infrastructure of the Dutch Research Council (NWO 184.034.014)
• NWO-LIFT (grant code ENPPS.LIFT.019.030) [more info...] NWO
• EFRO Kansen voor West [more info...] EU-REACT

TU Delft, Faculty of Applied Sciences, Department of Imaging Physics