@misc{https://doi.org/10.4121/9c98aee1-608e-4c71-8b89-dcb1e8eb3e5e.v1, doi = {10.4121/9c98aee1-608e-4c71-8b89-dcb1e8eb3e5e.v1}, url = {}, author = {Kievits, Arent J. and Duinkerken, B. H. Peter and Fermie, Job and Lane, Ryan and Giepmans, Ben N.G. and Hoogenboom, Jacob}, keywords = {Scanning Electron Microscopy, Scanning Transmission Electron Microscopy, Electron Detection, Volume Electron Microscopy, Instrumentation Development}, title = {Microscopy data underlying the publication "Optical STEM detection for scanning electron microscopy"}, publisher = {4TU.ResearchData}, year = {2023}, copyright = {CC BY 4.0}, }