Dataset accompanying the publication: "Scanning in coherent Fourier scatterometry using Fresnel zone plate projection on a digital micro-mirror device"

DOI:10.4121/e62d520c-d7b1-4ef6-a8b0-a90d588c4d5e.v1
The DOI displayed above is for this specific version of this dataset, which is currently the latest. Newer versions may be published in the future. For a link that will always point to the latest version, please use
DOI: 10.4121/e62d520c-d7b1-4ef6-a8b0-a90d588c4d5e

Datacite citation style

Soman, Sarika; Özdemir, Eren; Pereira, Silvania (2025): Dataset accompanying the publication: "Scanning in coherent Fourier scatterometry using Fresnel zone plate projection on a digital micro-mirror device". Version 1. 4TU.ResearchData. dataset. https://doi.org/10.4121/e62d520c-d7b1-4ef6-a8b0-a90d588c4d5e.v1
Other citation styles (APA, Harvard, MLA, Vancouver, Chicago, IEEE) available at Datacite

Dataset

Title: Dataset for “Scanning in Coherent Fourier Scatterometry Using Fresnel Zone Plate Projection on a Digital Micromirror Device”

Authors (publication): Sarika Soman, Eren Özdemir, Silvania F. Pereira


This dataset contains raw and processed experimental data used to support the findings in the publication “Scanning in coherent Fourier scatterometry using Fresnel zone plate projection on a digital micro-mirror device.” The data was collected as part of a study on high-speed, non-mechanical beam scanning for optical metrology applications. It includes coherent Fourier scatterometry (CFS) measurements of calibration gratings, focal plane intensity distributions, optical aberration characterisation, and particle detection scans, along with scripts used for data processing, step-size calibration, and wavefront optimisation. The dataset is organised to ensure reproducibility and reuse, and can be applied to related research in nanoscale surface inspection, adaptive optics, and programmable illumination.


History

  • 2025-11-04 first online, published, posted

Publisher

4TU.ResearchData

Format

Data files: .csv, .mat, .npy; Scripts: .m (MATLAB), .py (Python); Metadata: .txt

Funding

  • NWO (grant code P15-36) Nederlandse Organisatie voor Wetenschappelijk Onderzoek

Organizations

TU Delft, Faculty of Applied Sciences, Department of Imaging Physics

DATA

Files (11)