@misc{https://doi.org/10.4121/e62d520c-d7b1-4ef6-a8b0-a90d588c4d5e.v1,
  doi = {10.4121/e62d520c-d7b1-4ef6-a8b0-a90d588c4d5e.v1},
  url = {},
  author = {Soman, Sarika and Özdemir, Eren and Pereira, Silvania},
  keywords = {coherent Fourier scatterometry, Digital micro-mirror device scanning, Optical metrology, nanoscale structures},
  title = {Dataset accompanying the publication: "Scanning in coherent Fourier scatterometry using Fresnel zone plate projection on a digital micro-mirror device"},
  publisher = {4TU.ResearchData},
  year = {2025},
  copyright = {CC BY 4.0},
}