Title: Dataset for “Scanning in Coherent Fourier Scatterometry Using Fresnel Zone Plate Projection on a Digital Micromirror Device”
Authors (publication): Sarika Soman, Eren Özdemir, Silvania F. Pereira
This dataset contains raw and processed experimental data used to support the findings in the publication “Scanning in coherent Fourier scatterometry using Fresnel zone plate projection on a digital micro-mirror device.” The data was collected as part of a study on high-speed, non-mechanical beam scanning for optical metrology applications. It includes coherent Fourier scatterometry (CFS) measurements of calibration gratings, focal plane intensity distributions, optical aberration characterisation, and particle detection scans, along with scripts used for data processing, step-size calibration, and wavefront optimisation. The dataset is organised to ensure reproducibility and reuse, and can be applied to related research in nanoscale surface inspection, adaptive optics, and programmable illumination.