Datasets

• Data underlying the publication: Hydrogenated Amorphous Silicon Carbide: A Low-Loss Deposited Dielectric for Microwave to Submillimeter-Wave Superconducting Circuits
• Data underlying the publication: Characterization of low-loss hydrogenated amorphous silicon films for superconducting resonators
• Data underlying the publication: Vibrational modes as the origin of dielectric loss at 0.27–100 THz in a-SiC:H