de Jong, Matthijs; Norte, Richard A.; Steeneken, Peter; Cupertino, Andrea; ten Wolde, Malte (2022): Data supporting the paper: Mechanical dissipation by substrate-mode coupling in SiN resonators. Version 1. 4TU.ResearchData. dataset. https://doi.org/10.4121/19209333.v1

Dataset

x choose version: version 2 - 2022-07-19 (latest)

• Classical Physics

Coupled Oscillators, mechanical dissipation factor, Q-factor, SiN membrane, trampoline membrane

CC BY-SA 4.0

RefWorks, BibTeX, Reference Manager, Endnote, DataCite, NLM, DC, CFF

by Matthijs de Jong , Richard A. Norte , Peter Steeneken, Andrea Cupertino , Malte ten Wolde

Data supporting the paper "Mechanical dissipation by substrate-mode coupling in SiN resonators" of M.H.J. de Jong, Malte A. ten Wolde, A. Cupertino, Peter G. Steeneken and Richard A. Norte.

This zip file contains the individual figures of the publication, the (analyzed) data plotted in those figures and several (example) raw datasets. Also contained are the measurement and analysis scripts to obtain the raw and analyzed data, and several finite-element simulations as described in the publication. Detailed information is contained in the 'Readme.txt' file within the zip file.

• 2022-07-06 first online, published, posted

4TU.ResearchData

The zip file contains: - figures in .png and .pdf format - raw data files in .txt format - analysis scripts in .m (matlab) or .py (python) formats - analyzed data files in .csv format - finite-element simulation files in .mph format (COMSOL)

Mechanical dissipation by substrate-mode coupling in SiN resonators

• Graphene Flagship Core Project 2 (grant code 785219) [more info...] European Commission
• Graphene Flagship Core Project 3 (grant code 881603) [more info...] European Commission
• Horizon 2020 Framework Programme Award/Contract Number 17FUN05

TU Delft, Faculty of Mechanical, Maritime and Materials Engineering (3mE), Department of Precision and Microsystems Engineering (PME)