@misc{https://doi.org/10.4121/19209333.v1,
  doi = {10.4121/19209333.v1},
  url = {https://data.4tu.nl/articles/dataset/Data_supporting_the_paper_Mechanical_dissipation_by_substrate-mode_coupling_in_SiN_resonators/19209333/1},
  author = {de Jong, Matthijs and Norte, Richard A. and Steeneken, Peter and Cupertino, Andrea and ten Wolde, Malte},
  keywords = {SiN membrane, Coupled Oscillators, trampoline membrane, mechanical dissipation factor, Q-factor},
  title = {Data supporting the paper: Mechanical dissipation by substrate-mode coupling in SiN resonators},
  publisher = {4TU.ResearchData},
  year = {2022},
  copyright = {CC BY-SA 4.0},
}