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DOI: 10.4121/06bf96d9-18a7-4738-a1d8-efa8abbc7154

Pieters, Meike; Bartel, Lina; van Helvoirt, Cristian; Creatore, Mariadriana (2024): Data underlying the publication: Role of the Coreactant on the Dual-Source Behavior of Lithium Hexamethyldisilazide for ALD Li-Containing Films. Version 1. 4TU.ResearchData. dataset. https://doi.org/10.4121/06bf96d9-18a7-4738-a1d8-efa8abbc7154.v1

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Categories

• Physical Chemistry (incl. Structural)
• Other Physical Sciences
• Physical Sciences
• Chemical Sciences

Keywords

Atomic Layer Deposition lithium mass spectrometry precursors reaction mechanism

Licence

CC BY 4.0

Interoperability

• RO-Crate Metadata

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by Meike Pieters , Lina Bartel, Cristian van Helvoirt, Mariadriana Creatore

The publication is focused on unraveling the reaction mechanism of the lithium hexamethyldisilazide precursor for the growth of Si-free Li-containing thin films by atomic layer deposition (ALD). For this purpose the precursor was combined with various co-reactants and the ALD processes were investigated in situ by quadrupole mass spectrometry (QMS). The dataset contains the raw spectroscopic ellipsometry (SE), x-ray photoelectron spectroscopy (XPS) and QMS data, and the processed data.

History

• 2024-11-07 first online, published, posted

Publisher

4TU.ResearchData

Format

.xlsx .asc .iSE .SE .vgp .vgd

Associated peer-reviewed publication

Role of the Coreactant on the Dual-Source Behavior of Lithium Hexamethyldisilazide for ALD Li-Containing Films

Funding

• BatteryNL – Next Generation Batteries based on Understanding Materials Interfaces (grant code NWA.1389.20.089) NWO

Organizations

TU Eindhoven, Department of Applied Physics and Science Education