%0 Generic
%A Pieters, Meike
%A Bartel, Lina
%A van Helvoirt, Cristian
%A Creatore, Mariadriana
%D 2024
%T Data underlying the publication: Role of the Coreactant on the Dual-Source Behavior of Lithium Hexamethyldisilazide for ALD Li-Containing Films
%U 
%R 10.4121/06bf96d9-18a7-4738-a1d8-efa8abbc7154.v1
%K Atomic Layer Deposition
%K precursors
%K lithium
%K reaction mechanism
%K mass spectrometry
%X <p>The publication is focused on unraveling the reaction mechanism of the lithium hexamethyldisilazide precursor for the growth of Si-free Li-containing thin films by atomic layer deposition (ALD). For this purpose the precursor was combined with various co-reactants and the ALD processes were investigated in situ by quadrupole mass spectrometry (QMS). The dataset contains the raw spectroscopic ellipsometry (SE), x-ray photoelectron spectroscopy (XPS) and QMS data, and the processed data.</p>
%I 4TU.ResearchData