Usage statistics

Totals for datasets (co-)authored by Nicholas Chittock

Datasets

• Data underlying the publication: Isotropic atomic layer etching of GaN using SF6 plasma and Al(CH3)3
• Isotropic plasma atomic layer etching of Al2O3

Co-authors

Co-authors of Nicholas Chittock's datasets/collections. Bold: authors with a 4TU.ResearchData account.

• Adrie Mackus
• Erwin Kessels
• Harm Knoops
• Simon Elliott
• Yi Shu