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Totals for datasets (co-)authored by Adrie Mackus
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Adrie Mackus
Datasets
- Data underlying the publication: Computational Investigation of Precursor Blocking during Area-Selective Atomic Layer Deposition Using Aniline as a Small-Molecule Inhibitor
- Data underlying the publication: Isotropic atomic layer etching of GaN using SF6 plasma and Al(CH3)3
- Data underlying the publication: Packing of inhibitor molecules during area-selective atomic layer deposition studied using random sequential adsorption simulations
- Data underlying the publication: Blocking mechanisms in area-selective ALD by small molecule inhibitors of different sizes: Steric shielding versus chemical passivation
