Data underlying the article: Finite element method for 3D optical modeling of liquid crystal on silicon spatial light modulator

DOI:10.4121/15082800.v1
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DOI: 10.4121/15082800
Datacite citation style:
Chen, Po-Ju (2021): Data underlying the article: Finite element method for 3D optical modeling of liquid crystal on silicon spatial light modulator. Version 1. 4TU.ResearchData. dataset. https://doi.org/10.4121/15082800.v1
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Dataset

This research is to shown an robust electromagnetic method suitable for multiscale simulation domain, especially for LCoS SLM. The data in Fig 4 are the simulated diffraction efficiency of a fictitious 2D LCoS SLM using typical FEM method, FEM combined with scattering matrix method, and the proposed method, which is using scatter matrix method to combine FEM and RCWA simulation. The data in Fig.5 contain both simulation and experimental results of an actual LCoS SLM device. The simulated data is obtained with FEM method that combines with the transferred matrix methods in comparison to the proposed method. The experimental data is obtained with LCoS SLM that displayed a 6 pixel blazed grating with pixel pitch 8um.


History

  • 2021-08-17 first online, published, posted

Publisher

4TU.ResearchData

Funding

  • NOLOSS(675745)
  • Collective effects and optomechanics in ultra-cold matter (grant code 721465) [more info...] European Commission

Organizations

TU Delft, Faculty of Applied Sciences, Department of Imaging Physics, Optics Research Group