Wang, Shaogang; Zong, Qihang; Yang, Huiru; Tan, Chunjian; Huang, Qianming et. al. (2024): Data underlying the publication: Flexible pressure sensors fabricated based on UV direct writing technology. Version 1. 4TU.ResearchData. collection. https://doi.org/10.4121/4b4b5f77-6214-4cf4-acee-bea91aae5fc3.v1

Collection

x choose version: version 2 - 2024-10-27 (latest)

• Electrical and Electronic Engineering
• Manufacturing Engineering
• Materials Engineering
• Chemical Engineering
• Engineering

Continuous laser pyrolysis, Flexible pressure sensor, Laser direct writing, Micro-truncated pyramid, PDMS, UV laser

by Shaogang Wang , Qihang Zong , Huiru Yang , Chunjian Tan , Qianming Huang , Guoqi Zhang , Paddy French , Huaiyu Ye

Title: Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing

Authors: Shaogang Wang, Qihang Zong, Huiru Yang, Chunjian Tan, Qianming Huang, Xu Liu, Guoqi Zhang, Paddy French, Huaiyu Ye

Affiliations: Faculty of Electrical Engineering, Mathematics and Computer Science, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands; School of Microelectronics, Southern University of Science and Technology, Shenzhen 518055, China

Corresponding Author: Huaiyu Ye (email: hy.ye@tudelft.nl)

Abstract: This dataset supports our research on the development of high-performance flexible pressure sensors through laser pyrolysis direct writing (LPDW). Our approach leverages ultraviolet (UV) laser-induced pyrolysis of polydimethylsiloxane (PDMS) mixed with silicon carbide (SiC) nanoparticles to create precise microstructured surfaces. These surfaces enhance the mechanical properties required for flexible sensor applications. The data includes comprehensive details on fabrication parameters, the effects of different laser settings on material properties, and the resultant sensor performance in terms of sensitivity and durability.

Keywords: flexible pressure sensors, laser pyrolysis direct writing, PDMS, microstructure, sensor performance

Repository Contents:

1. Manuscript PDF: "Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing"
2. Supplementary Information PDF: Experimental methods, additional data on laser settings, microstructure measurements, and extended discussions on the fabrication process.
3. Video File: Demonstration of the sensor fabrication process and its response to applied pressure variations.

• 2024-10-27 first online, published, posted

4TU.ResearchData

Rapid fabrication of high-performance flexible pressure sensors using laser pyrolysis direct writing

Delft University of Technology; Southern University of Science and Technology.