20220531_Data underlying the publication Application of a dual-thermopile radical probe to expanding hydrogen plasmas.zip (737.4 kB)
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Data underlying the publication Application of a dual-thermopile radical probe to expanding hydrogen plasmas

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posted on 31.05.2022, 14:01 authored by Shih-Chi WangShih-Chi Wang, Ruud van der Horst, Maarten van Kampen, Thomas Morgan


Publication information:

Title: Data underlying the publication Application of a dual-thermopile radical probe to expanding hydrogen plasmas

Authors: Shih-Chi Wang, Ruud van der Horst, Maarten van Kampen, and Thomas W. Morgan

Corresponding author: Shih-Chi Wang

Corresponding ORCID: 0000-0002-1892-5285

Corresponding email address: s.c.wang@differ.nl

Organizations: DIFFER - Dutch Institute for Fundamental Energy Research and ASML

Journal: Plasma Sources Science and Technology

Keywords: cascaded arc source, heat flux sensor, hydrogen plasma, plasma-material processing, radical probe

Resource title: Application of a dual-thermopile radical probe to expanding hydrogen plasmas

Resource DOI: https://doi.org/10.1088/1361-6595/ac71c3


Description: This publication concerns experimental work on plasma diagnostics, and the research objective is to measure hydrogen radical flux using a dual-thermopile radical probe. The data collection was carried out by a McPherson 234/302 with 3mm thick MgF2 window, a Keithley 2410 SourceMeter, and a GraphTec midi logger GL200A. The collected data is series of numbers and is plotted in the multiple figures of the publication. This replication package contains multiple folders, each of which corresponds to a figure in the publication.


Creation date: 31-May-2022


Access right: open access


File formats: text file (.txt), excel sheet (.xlsx), and portable network graphics (.png).


Software version: Anaconda3-2019.10


Hardware version: Intel(R) Core(TM) i7-8650U CPU, RAM 8.0 GB


History

Publisher

4TU.ResearchData

Organizations

DIFFER - Dutch Institute for Fundamental Energy Research