Data underlying the publication Application of a dual-thermopile radical probe to expanding hydrogen plasmas
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Publication information:
Title: Data underlying the publication Application of a dual-thermopile radical probe to expanding hydrogen plasmas
Authors: Shih-Chi Wang, Ruud van der Horst, Maarten van Kampen, and Thomas W. Morgan
Corresponding author: Shih-Chi Wang
Corresponding ORCID: 0000-0002-1892-5285
Corresponding email address: s.c.wang@differ.nl
Organizations: DIFFER - Dutch Institute for Fundamental Energy Research and ASML
Journal: Plasma Sources Science and Technology
Keywords: cascaded arc source, heat flux sensor, hydrogen plasma, plasma-material processing, radical probe
Resource title: Application of a dual-thermopile radical probe to expanding hydrogen plasmas
Resource DOI: https://doi.org/10.1088/1361-6595/ac71c3
Description: This publication concerns experimental work on plasma diagnostics, and the research objective is to measure hydrogen radical flux using a dual-thermopile radical probe. The data collection was carried out by a Keithley 2410 SourceMeter and a GraphTec midi logger GL200A connected to a PC. The collected data is series of numbers and is plotted in the multiple figures of the publication. This replication package contains multiple folders, each of which corresponds to a figure in the publication.
Creation date: 07-Sep-2021
Access right: open access
File formats: text file (.txt), common separated data file (.csv), excel sheet (.xlsx), portable network graphics (.png), and python script (.py).
Software version: Anaconda3-2019.10
Hardware version: Intel(R) Core(TM) i7-8650U CPU, RAM 8.0 GB
- 2021-09-08 first online
- 2022-05-31 published, posted
DATA
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