20210907_Data underlying the publication Application of a dual-thermopile radical probe to high-flux expanding hydrogen plasmas.zip (1.08 MB)

Data underlying the publication Application of a dual-thermopile radical probe to high-flux expanding hydrogen plasmas

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posted on 08.09.2021, 11:00 by Shih-Chi WangShih-Chi Wang, Maarten van Kampen, Thomas Morgan
Publication information:
Title: Application of a dual-thermopile radical probe to high-flux expanding hydrogen plasmas
Authors: Shih-Chi Wang, Maarten van Kampen, and Thomas W. Morgan
Corresponding author: Shih-Chi Wang
Corresponding ORCID: 0000-0002-1892-5285
Corresponding email address: s.c.wang@differ.nl
Organizations: DIFFER - Dutch Institute for Fundamental Energy Research and ASML
Journal: Plasma Sources Science and Technology
Keywords: cascaded arc source, heat flux sensor, hydrogen plasma, plasma-material processing, radical probe
Resource title: To be determined
Resource DOI: To be determined

Description: This publication concerns experimental work on plasma diagnostics, and the research objective is to measure hydrogen radical flux using a dual-thermopile radical probe. The data collection was carried out by a Keithley 2410 SourceMeter and a GraphTec midi logger GL200A connected to a PC. The collected data is series of numbers and is plotted in the multiple figures of the publication. This replication package contains multiple folders, each of which corresponds to a figure in the publication.

Creation date: 07-Sep-2021

Access right: open access

File formats: text file (.txt), common separated data file (.csv), excel sheet (.xlsx), portable network graphics (.png), and python script (.py).

Software version: Anaconda3-2019.10

Hardware version: Intel(R) Core(TM) i7-8650U CPU, RAM 8.0 GB

History

Publisher

4TU.ResearchData

Organizations

DIFFER - Dutch Institute for Fundamental Energy Research