*** Microscopic artificial cilia - a review *** 
Authors: ul Islam, T., Wang, Y., Aggarwal, I., Cui, Z., Eslami Amirabadi, H., Garg, H., Kooi, R., Venkataramanachar, B., Wang, T., Zhang, S., Onck, P. R., & den Toonder, J. M. J.
Department of Mechanical Engineering and Institute for Complex Molecular Systems, Eindhoven University of Technology

Corresponding author: J.M.J. den Toonder 

Contact Information: 

j.m.j.d.toonder@tue.nl

Eindhoven University of Technology Ð Department of Mechanical Engineering 
P.O. Box 513
5600 MB Eindhoven
The Netherlands

***General Introduction***
This dataset contains data collected during a literature review carried out at  Eindhoven University of Technology, as reported in the journal article: doi: 10.1039/d1lc01168e.
It is being made public both to act as supplementary data for the publication and in order for other researchers to use this data in their own work, under the condition that the source publication is appropriately cited.

The data in this data set was constructed Eindhoven University of Technology Ð Department of Mechanical Engineering, in 2021.
This work was supported by the European Research Council (ERC) Advanced Grant Bio-Plan project under grant agreement no. 833214.

***Purpose of the study***
In the paper, we provide a critical review of the progress in artificial cilia research and development as well as an evaluation of its future potential. We cover all aspects from fabrication approaches, actuation principles, artificial cilia functions Ð flow generation, particle transport and flow sensing Ð to applications. In addition to in-depth analyses of the current state of knowledge, we provide classifications of the different approaches and quantitative comparisons of the results obtained. The data were extracted from the existing literature as described in the publication.

***Description of the data in this data set***
The data set is provided both in .xlsx and .csv format. Each file contains the data presented in a specific figure in the publication. Each filename corresponds with the figure of which it contains the data.