TY - DATA
T1 - Codes and data associated with the processing of the pre-charged CMUT characterisation
PY - 2024/03/19
AU - Marta Saccher
UR - 
DO - 10.4121/e363fbd3-c8c2-4bde-b91e-530838cd194a.v1
KW - pre-charged CMUTs
KW - collapse-mode CMUTs
KW - characterisation
KW - Capacitive Micromachined Ultrasonic Transducer (CMUT)
N2 - <p>This dataset contains the data relative to the characterisation of the pre-charged collapse-mode CMUTs. To characterise them, the I-V curves (current-voltage) curves of test capacitors fabricated in the same process flow were measured until breakdown. The CMUTs were then characterised by mesuring the shift in C-V (capacitance-voltage) curve after charging, their impedance and the membrane profile using a digital holographic microscope. To assess their charge retention over time, accelerated lifetime tests were perfomed and their impedance was measured over time to detect the time to failure. A readme file is included with explanation of each folder content. Each folder includes also a readme file with explanation of the content.</p>
ER -