This data set contains the source data of the publication: Tanveer ul Islam, Bellouard, Y. & Toonder, J.M.J. den (2021). Highly motile nanoscale magnetic artificial cilia. PNAS Vol. 118, No. 35, e2104930118.
https://doi.org/10.1073/pnas.2104930118. In this work, we report a magnetic elastomer preparation process coupled with a tailored molding process for the successful fabrication of artificial cilia with submicrometer dimensions showing unprecedented deflection capabilities, enabling the design of artificial cilia with high motility and at sizes equal to those of their smallest biological counterparts. The reported work crosses the barrier of nanoscale motile cilia fabrication, paving the way for maximum control and manipulation of structures and processes at micro- and nanoscales. The data are experimentally obtained with methods described in the publication.
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