TY - DATA
T1 - Data underlying the publication Application of a dual-thermopile radical probe to expanding hydrogen plasmas
PY - 2022/05/31
AU - Shih-Chi Wang
AU - Ruud van der Horst
AU - Maarten van Kampen
AU - Thomas Morgan
UR - https://data.4tu.nl/articles/dataset/Data_underlying_the_publication_Application_of_a_dual-thermopile_radical_probe_to_high-flux_expanding_hydrogen_plasmas/16566141/3
DO - 10.4121/16566141.v3
KW - Plasma Source
KW - heat flux sensors
KW - hydrogen plasma reaction
KW - Plasma materials processing
KW - Radical probe experiments
N2 - <p><br></p>
<p>Publication information:</p>
<p>Title: Data underlying the publication Application of a dual-thermopile radical probe to expanding hydrogen plasmas</p>
<p>Authors: Shih-Chi Wang, Ruud van der Horst, Maarten van Kampen, and Thomas W. Morgan</p>
<p>Corresponding author: Shih-Chi Wang</p>
<p>Corresponding ORCID: 0000-0002-1892-5285</p>
<p>Corresponding email address: s.c.wang@differ.nl</p>
<p>Organizations: DIFFER - Dutch Institute for Fundamental Energy Research and ASML</p>
<p>Journal: Plasma Sources Science and Technology</p>
<p>Keywords: cascaded arc source, heat flux sensor, hydrogen plasma, plasma-material processing, radical probe</p>
<p>Resource title: Application of a dual-thermopile radical probe to expanding hydrogen plasmas</p>
<p>Resource DOI: https://doi.org/10.1088/1361-6595/ac71c3</p>
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<p>Description: This publication concerns experimental work on plasma diagnostics, and the research objective is to measure hydrogen radical flux using a dual-thermopile radical probe. The data collection was carried out by a McPherson 234/302 with 3mm thick MgF2 window, a Keithley 2410 SourceMeter, and a GraphTec midi logger GL200A. The collected data is series of numbers and is plotted in the multiple figures of the publication. This replication package contains multiple folders, each of which corresponds to a figure in the publication.</p>
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<p>Creation date: 31-May-2022</p>
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<p>Access right: open access</p>
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<p>File formats: text file (.txt), excel sheet (.xlsx), and portable network graphics (.png).</p>
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<p>Software version: Anaconda3-2019.10</p>
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<p>Hardware version: Intel(R) Core(TM) i7-8650U CPU, RAM 8.0 GB</p>
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