TY - DATA T1 - Full dataset of the article: Robust local thickness estimation of sub-micrometer specimen by 4D-STEM PY - 2023/04/06 AU - Radim SkoupĂ˝ AU - Daan Boltje UR - DO - 10.4121/21365268.v2 KW - Quantitative STEM analysis KW - 4D-STEM KW - sample thickness N2 -

Datasets were taken for q4STEM method evaluation (quantitative 4D STEM). It enables in-situ local thickness estimation of amorphous electron transparent samples such as lamellas used in TEM tomography. They are named by the used detector (direct detection STEM; ligth conversion STEM) and the sample (ultrathin section of lung tissue; latex beads; FIB milled stepped lamella - epoxy resin).

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