TY - DATA T1 - Full dataset of the article: Robust local thickness estimation of sub-micrometer specimen by 4D-STEM PY - 2023/02/20 AU - Radim SkoupĂ˝ AU - Daan Boltje UR - https://data.4tu.nl/articles/dataset/Full_dataset_of_the_article_Robust_local_thickness_estimation_of_sub-micrometer_specimen_by_4D-STEM/21365268/1 DO - 10.4121/21365268.v1 KW - Quantitative STEM analysis KW - 4D-STEM KW - sample thickness N2 -

Datasets were taken for q4STEM method evaluation (quantitative 4D STEM). It enables in-situ local thickness estimation of amorphous electron transparent samples such as lamellas used in TEM tomography. They are named by the used detector (direct detection STEM; ligth conversion STEM) and the sample (ultrathin section of lung tissue; latex beads; FIB milled stepped lamella - epoxy resin).

ER -