TY - DATA T1 - Data supporting the paper: Mechanical dissipation by substrate-mode coupling in SiN resonators PY - 2022/07/19 AU - Matthijs de Jong AU - Richard A. Norte AU - Peter Steeneken AU - Andrea Cupertino AU - Malte ten Wolde AU - Simon Gröblacher UR - https://data.4tu.nl/articles/dataset/Data_supporting_the_paper_Mechanical_dissipation_by_substrate-mode_coupling_in_SiN_resonators/19209333/2 DO - 10.4121/19209333.v2 KW - SiN membrane KW - Coupled Oscillators KW - trampoline membrane KW - mechanical dissipation factor KW - Q-factor N2 -

Data supporting the paper "Mechanical dissipation by substrate-mode coupling in SiN resonators" of M.H.J. de Jong, Malte A. ten Wolde, A. Cupertino, S. Gröblacher, Peter G. Steeneken and Richard A. Norte.

This zip file contains the individual figures of the publication, the (analyzed) data plotted in those figures and several (example) raw datasets. Also contained are the measurement and analysis scripts to obtain the raw and analyzed data, and several finite-element simulations as described in the publication. Detailed information is contained in the 'Readme.txt' file within the zip file.

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