%0 Generic
%A Saccher, Marta
%D 2024
%T Codes and data associated with the processing of the pre-charged CMUT characterisation
%U 
%R 10.4121/e363fbd3-c8c2-4bde-b91e-530838cd194a.v1
%K pre-charged CMUTs
%K collapse-mode CMUTs
%K characterisation
%K Capacitive Micromachined Ultrasonic Transducer (CMUT)
%X <p>This dataset contains the data relative to the characterisation of the pre-charged collapse-mode CMUTs. To characterise them, the I-V curves (current-voltage) curves of test capacitors fabricated in the same process flow were measured until breakdown. The CMUTs were then characterised by mesuring the shift in C-V (capacitance-voltage) curve after charging, their impedance and the membrane profile using a digital holographic microscope. To assess their charge retention over time, accelerated lifetime tests were perfomed and their impedance was measured over time to detect the time to failure. A readme file is included with explanation of each folder content. Each folder includes also a readme file with explanation of the content.</p>
%I 4TU.ResearchData