%0 Generic
%A Yu, Pengmei
%A Merkx, Marc
%A Tezsevin, Ilker
%A Lemaire, Paul C.
%A Hausmann, Dennis M.
%A Sandoval, Tania E.
%A Kessels, Wilhelmus M. M.
%A Mackus, Adrie
%D 2024
%T Data underlying the publication: Blocking mechanisms in area-selective ALD by small molecule inhibitors of different sizes: Steric shielding versus chemical passivation
%U 
%R 10.4121/c357264b-f395-4409-bedc-328f45f6e6ac.v1
%K Small molecule inhibitors
%K Area-selective deposition
%K Atomic layer deposition
%K Fourier-transform infrared spectroscopy
%K Spectroscopic ellipsometry
%X <p>The publication is focused on unravelling the contributions of two important factors to the blocking performance of small molecule inhibitors: steric shielding and chemical passivation, which was explored both experimentally and theoretically.&nbsp;The dataset contains the raw data, inputs and outputs files for simulations, images and tables for the manuscript.</p>
%I 4TU.ResearchData