%0 Generic
%A Skoupý, Radim
%A Boltje, Daan
%D 2023
%T Full dataset of the article: Robust local thickness estimation of sub-micrometer specimen by 4D-STEM
%U 
%R 10.4121/21365268.v2
%K Quantitative STEM analysis
%K 4D-STEM
%K sample thickness
%X <p>Datasets were taken for q4STEM method evaluation (quantitative 4D STEM). It enables in-situ local thickness estimation of amorphous electron transparent samples such as lamellas used in TEM tomography. They are named by the used detector (direct detection STEM; ligth conversion STEM) and the sample (ultrathin section of lung tissue; latex beads; FIB milled stepped lamella - epoxy resin).</p>
%I 4TU.ResearchData