cff-version: 1.2.0
abstract: "<p>Superconducting circuit elements used in millimeter-submillimeter (mm-submm) astronomy would greatly benefit from deposited dielectrics with small dielectric loss and noise. This will enable the use of multilayer circuit elements and thereby increase the efficiency of mm-submm filters and allow for a miniaturization of microwave kinetic inductance detectors (MKIDs). Amorphous dielectrics introduce excess loss and noise compared with their crystalline counterparts, due to two-level system defects of unknown microscopic origin. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C, and 350°C. The measured void volume fraction, hydro- gen content, microstructure parameter, and bond-angle disorder are negatively correlated with the substrate temperature. All three films have a loss tangent below&nbsp;10−5&nbsp;for a resonator energy of&nbsp;105&nbsp;photons, at 120 mK and 4 to 7 GHz. This makes these films promising for MKIDs and on-chip mm-submm filters.</p>"
authors:
  - family-names: Buijtendorp
    given-names: Bruno
title: "Data  underlying the publication: Characterization of low-loss hydrogenated amorphous silicon films for superconducting resonators"
keywords:
version: 1
identifiers:
  - type: doi
    value: 10.4121/ff8e2171-87d6-4bf4-a5cb-7930cf45b366.v1
license: CC0
date-released: 2024-10-25