cff-version: 1.2.0 abstract: "
This dataset contains the data relative to the characterisation of the pre-charged collapse-mode CMUTs. To characterise them, the I-V curves (current-voltage) curves of test capacitors fabricated in the same process flow were measured until breakdown. The CMUTs were then characterised by mesuring the shift in C-V (capacitance-voltage) curve after charging, their impedance and the membrane profile using a digital holographic microscope. To assess their charge retention over time, accelerated lifetime tests were perfomed and their impedance was measured over time to detect the time to failure. A readme file is included with explanation of each folder content. Each folder includes also a readme file with explanation of the content.
" authors: - family-names: Saccher given-names: Marta orcid: "https://orcid.org/0000-0002-9509-7815" title: "Codes and data associated with the processing of the pre-charged CMUT characterisation" keywords: version: 1 identifiers: - type: doi value: 10.4121/e363fbd3-c8c2-4bde-b91e-530838cd194a.v1 license: CC0 date-released: 2024-03-19