This dataset contains all the data supporting the PhD thesis "Exploring the quality factor limits of room temperature nanomechanical resonators" from TU Delft, the Netherlands. The thesis aims at studying the limits of nanomechanical resonators' quality factor at room temperature. It revolves around four main facets, addressing limitations in fabrication techniques, design strategies, exploring the impact of aspect ratio on quality factor enhancement, and investigating the potential for temperature sensing. A digital version of the thesis can be found online at https://repository.tudelft.nl