cff-version: 1.2.0
abstract: "<p>The publication is focused on unravelling the contributions of two important factors to the blocking performance of small molecule inhibitors: steric shielding and chemical passivation, which was explored both experimentally and theoretically.&nbsp;The dataset contains the raw data, inputs and outputs files for simulations, images and tables for the manuscript.</p>"
authors:
  - family-names: Yu
    given-names: Pengmei
    orcid: "https://orcid.org/0000-0003-3273-8790"
  - family-names: Merkx
    given-names: Marc
    orcid: "https://orcid.org/0000-0002-3886-0220"
  - family-names: Tezsevin
    given-names: Ilker
    orcid: "https://orcid.org/0000-0001-5648-3943"
  - family-names: Lemaire
    given-names: Paul C.
    orcid: "https://orcid.org/0000-0002-2077-8114"
  - family-names: Hausmann
    given-names: Dennis M.
  - family-names: Sandoval
    given-names: Tania E.
    orcid: "https://orcid.org/0000-0001-9418-5031"
  - family-names: Kessels
    given-names: Wilhelmus M. M.
    orcid: "https://orcid.org/0000-0002-7630-8226"
  - family-names: Mackus
    given-names: Adrie
    orcid: "https://orcid.org/0000-0001-6944-9867"
title: "Data underlying the publication: Blocking mechanisms in area-selective ALD by small molecule inhibitors of different sizes: Steric shielding versus chemical passivation"
keywords:
version: 1
identifiers:
  - type: doi
    value: 10.4121/c357264b-f395-4409-bedc-328f45f6e6ac.v1
license: CC BY 4.0
date-released: 2024-05-02