cff-version: 1.2.0
abstract: "<p></p><p>This
research is to shown an robust electromagnetic method suitable for multiscale
simulation domain, especially for LCoS SLM. The data in Fig 4 are the simulated
diffraction efficiency of a fictitious 2D LCoS SLM using typical FEM method,
FEM combined with scattering matrix method, and the proposed method, which is using
scatter matrix method to combine FEM and RCWA simulation. The data in Fig.5
contain both simulation and experimental results of an actual LCoS SLM device. The
simulated data is obtained with FEM method that combines with the transferred matrix
methods in comparison to the proposed method. The experimental data is obtained
with LCoS SLM that displayed a 6 pixel blazed grating with pixel pitch 8um. </p><br><p></p>"
authors:
  - family-names: Chen
    given-names: Po-Ju
    orcid: "https://orcid.org/0000-0003-0714-7796"
title: "Data underlying the article: Finite element method for 3D optical modeling of liquid crystal on silicon spatial light modulator"
keywords:
version: 1
identifiers:
  - type: doi
    value: 10.4121/15082800.v1
license: CC BY 4.0
date-released: 2021-08-17