cff-version: 1.2.0 abstract: "Publication information:
Title: Application of a dual-thermopile radical probe to high-flux expanding hydrogen plasmas
Authors: Shih-Chi Wang, Maarten van Kampen, and Thomas W. Morgan
Corresponding author: Shih-Chi Wang
Corresponding ORCID: 0000-0002-1892-5285
Corresponding email address: s.c.wang@differ.nl
Organizations: DIFFER - Dutch Institute for Fundamental Energy Research and ASML
Journal: Plasma Sources Science and Technology
Keywords: cascaded arc source, heat flux sensor, hydrogen plasma, plasma-material processing, radical probe
Resource title: To be determined
Resource DOI: To be determined

Description: This publication concerns experimental work on plasma diagnostics, and the research objective is to measure hydrogen radical flux using a dual-thermopile radical probe. The data collection was carried out by a Keithley 2410 SourceMeter and a GraphTec midi logger GL200A connected to a PC. The collected data is series of numbers and is plotted in the multiple figures of the publication. This replication package contains multiple folders, each of which corresponds to a figure in the publication.

Creation date: 07-Sep-2021

Access right: open access

File formats: text file (.txt), common separated data file (.csv), excel sheet (.xlsx), portable network graphics (.png), and python script (.py).

Software version: Anaconda3-2019.10

Hardware version: Intel(R) Core(TM) i7-8650U CPU, RAM 8.0 GB

" authors: - family-names: Wang given-names: Shih-Chi - family-names: van Kampen given-names: Maarten - family-names: Morgan given-names: Thomas orcid: "https://orcid.org/0000-0002-5066-015X" title: "Data underlying the publication Application of a dual-thermopile radical probe to high-flux expanding hydrogen plasmas" keywords: version: 1 identifiers: - type: doi value: 10.4121/16566141.v1 license: CC0 date-released: 2021-09-08