cff-version: 1.2.0
abstract: "Data used to plot all of the figures in the letter titled "Isotropic plasma atomic layer etching of Al2O3 using a fluorine containing plasma and Al(CH3)3)". Each figure has its own page, original origin files are available upon request."
authors:
  - family-names: Chittock
    given-names: Nicholas
title: "Isotropic plasma atomic layer etching of Al2O3"
keywords:
version: 1
identifiers:
  - type: doi
    value: 10.4121/13011239.v1
license: CC0
date-released: 2020-10-21