cff-version: 1.2.0
abstract: "<p>The data sets provide the necessary information to derive the figures of the paper "Wafer-scale low-disorder 2DEG in 28Si/SiGe without an epitaxial Si cap"  Preprint at https://arxiv.org/abs/2202.08090</p>"
authors:
  - family-names: Degli Esposti
    given-names: Davide
    orcid: "https://orcid.org/0000-0003-2275-8288"
title: "Supporting information to derive the figures of the paper: &#34;Wafer-scale low-disorder 2DEG in 28Si/SiGe without an epitaxial Si cap&#34;"
keywords:
version: 1
identifiers:
  - type: doi
    value: 10.4121/19181597.v1
license: CC BY-SA 4.0
date-released: 2022-04-13