cff-version: 1.2.0
abstract: "<p>Data and codes about the 3rd paper "Finite Element-based Nonlinear Dynamic Optimization of Nanomechanical Resonators", which including the codes for analytical derivation, the COMSOL model for simulation and the experimental results. The contents are organized based on the number of figures in the published paper.</p>"
authors:
  - family-names: Li
    given-names: Zichao
    orcid: "https://orcid.org/0000-0002-3625-7081"
  - family-names: Steeneken
    given-names: Peter
  - family-names: Alijani
    given-names: Farbod
  - family-names: Aragón
    given-names: Alejandro
    orcid: "https://orcid.org/0000-0003-2275-6207"
title: "Data and codes underlying the publication: Finite Element-based Nonlinear Dynamic Optimization of Nanomechanical Resonators"
keywords:
version: 2
identifiers:
  - type: doi
    value: 10.4121/66610544-dad6-48c1-a7fe-eb7263ce541a.v2
license: Restrictive Licence
date-released: 2024-11-13