cff-version: 1.2.0 abstract: "

The addition of an optically absorptive layer to otherwise standard dielectric mirrors enables a set of laser direct writing nanostructuring methods that can add functionality to such mirrors while retaining their high reflectivity. A thorough characterization of this method is given in this paper, and its physical origins are investigated. In particular, our measurements show that laser direct writing of such mirrors has a reversible and a permanent component. The reversible process originates from the thermal expansion of the surface and allows a simple yet precise way to temporarily modify the shape of the mirror. Scanning electron microscope cross-sectional images suggest that the permanent part of the nanostructuring process is due to thermally induced pore formation and enlargement in the tantalum oxide layers of the used dielectric mirror.

" authors: - family-names: Vretenar given-names: Mario - family-names: Puplauskis given-names: Marius - family-names: Klärs given-names: Jan orcid: "https://orcid.org/0000-0001-5939-7477" title: "Data underlying the publication: Mirror Surface Nanostructuring via Laser Direct Writing - Characterization and Physical Origins" keywords: version: 1 identifiers: - type: doi value: 10.4121/22231669.v1 license: CC BY-NC-ND 4.0 date-released: 2023-03-08