cff-version: 1.2.0
abstract: "<p>Data supporting the paper "Mechanical dissipation by substrate-mode coupling in SiN resonators" of M.H.J. de Jong, Malte A. ten Wolde, A. Cupertino, S. Gröblacher, Peter G. Steeneken and Richard A. Norte.</p>
<p>This zip file contains the individual figures of the publication, the (analyzed) data plotted in those figures and several (example) raw datasets. Also contained are the measurement and analysis scripts to obtain the raw and analyzed data, and several finite-element simulations as described in the publication. Detailed information is contained in the 'Readme.txt' file within the zip file.<br>
</p>"
authors:
  - family-names: de Jong
    given-names: Matthijs
    orcid: "https://orcid.org/0000-0002-0146-083X"
  - family-names: Norte
    given-names: Richard A.
    orcid: "https://orcid.org/0000-0003-1458-5735"
  - family-names: Steeneken
    given-names: Peter
  - family-names: Cupertino
    given-names: Andrea
    orcid: "https://orcid.org/0000-0001-6862-2744"
  - family-names: ten Wolde
    given-names: Malte
    orcid: "https://orcid.org/0000-0001-8026-0483"
  - family-names: Gröblacher
    given-names: Simon
    orcid: "https://orcid.org/0000-0003-3932-7820"
title: "Data supporting the paper: Mechanical dissipation by substrate-mode coupling in SiN resonators"
keywords:
version: 2
identifiers:
  - type: doi
    value: 10.4121/19209333.v2
license: CC BY-SA 4.0
date-released: 2022-07-19