cff-version: 1.2.0
abstract: "<p>The publication is focused on unraveling the reaction mechanism of the lithium hexamethyldisilazide precursor for the growth of Si-free Li-containing thin films by atomic layer deposition (ALD). For this purpose the precursor was combined with various co-reactants and the ALD processes were investigated in situ by quadrupole mass spectrometry (QMS). The dataset contains the raw spectroscopic ellipsometry (SE), x-ray photoelectron spectroscopy (XPS) and QMS data, and the processed data.</p>"
authors:
  - family-names: Pieters
    given-names: Meike
    orcid: "https://orcid.org/0009-0003-3391-1927"
  - family-names: Bartel
    given-names: Lina
  - family-names: van Helvoirt
    given-names: Cristian
  - family-names: Creatore
    given-names: Mariadriana
    orcid: "https://orcid.org/0000-0002-5318-8954"
title: "Data underlying the publication: Role of the Coreactant on the Dual-Source Behavior of Lithium Hexamethyldisilazide for ALD Li-Containing Films"
keywords:
version: 1
identifiers:
  - type: doi
    value: 10.4121/06bf96d9-18a7-4738-a1d8-efa8abbc7154.v1
license: CC BY 4.0
date-released: 2024-11-07