@misc{https://doi.org/10.4121/f6a82a0a-a50a-4453-b6a5-1a2b1dde7001.v1,
  doi = {10.4121/f6a82a0a-a50a-4453-b6a5-1a2b1dde7001.v1},
  url = {},
  author = {Wang, Shih-Chi and van Kampen, Maarten and Morgan, Thomas},
  keywords = {hydrogen plasma, hydrogen uptake, deuterium, Ru, Ru oxide, Sn, thin films, oxide removal, surface coverage, reaction-diffusion model},
  title = {Data underlying the publication Promotion of plasma-induced deuterium uptake of ruthenium films by monolayer-thick tin layers},
  publisher = {4TU.ResearchData},
  year = {2023},
  copyright = {CC0},
}