@misc{https://doi.org/10.4121/19915324.v1, doi = {10.4121/19915324.v1}, url = {https://data.4tu.nl/articles/dataset/Source_data_for_the_publication_Microscopic_artificial_cilia_a_review/19915324/1}, author = {den Toonder, Jaap}, keywords = {Artificial Cilia, Microfluidics, Lab on a chip, Micropump, Particle manipulation, flow sensing, microfabrication method}, title = {Source data for the publication: Microscopic artificial cilia – a review}, publisher = {4TU.ResearchData}, year = {2022}, copyright = {CC BY-NC 4.0}, }