@misc{https://doi.org/10.4121/19915324.v1,
  doi = {10.4121/19915324.v1},
  url = {https://data.4tu.nl/articles/dataset/Source_data_for_the_publication_Microscopic_artificial_cilia_a_review/19915324/1},
  author = {Toonder, den, Jaap},
  keywords = {Artificial Cilia, Microfluidics, Lab on a chip, Micropump, Particle manipulation, flow sensing, microfabrication method},
  title = {Source data for the publication: Microscopic artificial cilia – a review},
  publisher = {4TU.ResearchData},
  year = {2022},
  copyright = {CC BY-NC 4.0},
}