@misc{https://doi.org/10.4121/14798358.v1,
  doi = {10.4121/14798358.v1},
  url = {https://data.4tu.nl/articles/dataset/Raw_data_contained_in_paper_Multilayer_precursors_for_enhanced_Sm2_and_Tm2_in_SiAlO_thin_films_prepared_by_magnetron_sputtering_/14798358/1},
  author = {Bizinoto Ferreira Bosco, Giacomo and Biesen, J.K. van den and Boers, C. and Simone, G. and Kao, J. and Tichelaar, F.D. and Boshuizen, B. and Kolk, E. van der},
  keywords = {Samarium, Thulium, Magnetron Sputtering, Multilayered Thin Films, SiAlON},
  title = {Raw data contained in paper "Multilayer precursors for  enhanced Sm2+ and Tm2+ in SiAlO thin films prepared by magnetron sputtering"},
  publisher = {4TU.ResearchData},
  year = {2021},
  copyright = {CC BY-NC 4.0},
}