@misc{https://doi.org/10.4121/c357264b-f395-4409-bedc-328f45f6e6ac.v1,
  doi = {10.4121/c357264b-f395-4409-bedc-328f45f6e6ac.v1},
  url = {},
  author = {Yu, Pengmei and Merkx, Marc and Tezsevin, Ilker and Lemaire, Paul C. and Hausmann, Dennis M. and Sandoval, Tania E. and Kessels, Wilhelmus M. M. and Mackus, Adrie},
  keywords = {Small molecule inhibitors, Area-selective deposition, Atomic layer deposition, Fourier-transform infrared spectroscopy, Spectroscopic ellipsometry},
  title = {Data underlying the publication: Blocking mechanisms in area-selective ALD by small molecule inhibitors of different sizes: Steric shielding versus chemical passivation},
  publisher = {4TU.ResearchData},
  year = {2024},
  copyright = {CC BY 4.0},
}