@misc{https://doi.org/10.4121/c29dd5f3-68bf-4f5a-a159-00f0c1579541.v1,
  doi = {10.4121/c29dd5f3-68bf-4f5a-a159-00f0c1579541.v1},
  url = {},
  author = {Santoso, Albert and van Ommen, J.Ruud  and van Steijn, Volkert},
  keywords = {atomic layer deposition, PDMS, polymer, nanolayers},
  title = {Dataset for Atmospheric pressure atomic layer deposition to increase organic solvent resistance of PDMS},
  publisher = {4TU.ResearchData},
  year = {2024},
  copyright = {CC BY-NC 4.0},
}