@misc{https://doi.org/10.4121/19425749.v1,
  doi = {10.4121/19425749.v1},
  url = {https://data.4tu.nl/articles/dataset/Data_underlying_the_publication_In_situ_reflectometry_and_diffraction_investigation_of_the_multiscale_structure_of_p-type_polysilicon_passivating_contacts_for_c-Si_solar_cells/19425749/1},
  author = {Bannenberg, Lars and Morisset, Audrey and Famprikis, Theodosios},
  keywords = {c-Si solar cells, passivating contacts, poly-Si, SiOx, X-ray reflectometry, in situ monitoring, annealing},
  title = {Data underlying the publication: In situ reflectometry and diffraction investigation of the multiscale structure of p-type polysilicon passivating contacts for c-Si solar cells},
  publisher = {4TU.ResearchData},
  year = {2022},
  copyright = {CC BY-NC-ND 4.0},
}