@misc{https://doi.org/10.4121/19181597.v1, doi = {10.4121/19181597.v1}, url = {https://data.4tu.nl/articles/dataset/Supporting_information_to_derive_the_figures_of_the_paper_Wafer-scale_low-disorder_2DEG_in_28Si_SiGe_without_an_epitaxial_Si_cap_/19181597/1}, author = {Degli Esposti, Davide}, keywords = {Si/SiGe, heterostructure interface, spin qubit, silicon quantum dots}, title = {Supporting information to derive the figures of the paper: "Wafer-scale low-disorder 2DEG in 28Si/SiGe without an epitaxial Si cap"}, publisher = {4TU.ResearchData}, year = {2022}, copyright = {CC BY-SA 4.0}, }