@misc{https://doi.org/10.4121/19181597.v1,
  doi = {10.4121/19181597.v1},
  url = {https://data.4tu.nl/articles/dataset/Supporting_information_to_derive_the_figures_of_the_paper_Wafer-scale_low-disorder_2DEG_in_28Si_SiGe_without_an_epitaxial_Si_cap_/19181597/1},
  author = {Degli Esposti, Davide},
  keywords = {Si/SiGe, heterostructure interface, spin qubit, silicon quantum dots},
  title = {Supporting information to derive the figures of the paper: "Wafer-scale low-disorder 2DEG in 28Si/SiGe without an epitaxial Si cap"},
  publisher = {4TU.ResearchData},
  year = {2022},
  copyright = {CC BY-SA 4.0},
}