@misc{https://doi.org/10.4121/19572238.v1,
  doi = {10.4121/19572238.v1},
  url = {https://data.4tu.nl/articles/dataset/Data_underlying_the_article_Crack_barriers_for_thick_SiN_using_dicing_in_Optics_Express/19572238/1},
  author = {Offerhaus, Herman and Grootes, Ruben and Dijkstra, Meindert and Klaver, Yvan and Marpaung, David},
  keywords = {Silicon Nitride (SiN)},
  title = {Data underlying the article: Crack barriers for thick SiN using dicing in Optics Express},
  publisher = {4TU.ResearchData},
  year = {2022},
  copyright = {CC0},
}