@misc{https://doi.org/10.4121/523d71a0-34ce-4969-a899-00668b9f3265.v1, doi = {10.4121/523d71a0-34ce-4969-a899-00668b9f3265.v1}, url = {}, author = {Buijtendorp, Bruno}, keywords = {mm-submm, loss, dielectric, silicon carbide, amorphous, hydrogenated, vibrational modes, superconducting}, title = {Data underlying the publication: Vibrational modes as the origin of dielectric loss at 0.27–100 THz in a-SiC:H}, publisher = {4TU.ResearchData}, year = {2024}, copyright = {CC0}, }