@misc{https://doi.org/10.4121/21365268.v2, doi = {10.4121/21365268.v2}, url = {}, author = {SkoupĂ˝, Radim and Boltje, Daan}, keywords = {Quantitative STEM analysis, 4D-STEM, sample thickness}, title = {Full dataset of the article: Robust local thickness estimation of sub-micrometer specimen by 4D-STEM}, publisher = {4TU.ResearchData}, year = {2023}, copyright = {CC0}, }